Nano-metrology: The art of measuring X-ray mirrors with slope errors <100 nrad
نویسندگان
چکیده
منابع مشابه
Long, elliptically bent, active X-ray mirrors with slope errors <200 nrad
Actively bent X-ray mirrors are important components of many synchrotron and X-ray free-electron laser beamlines. A high-quality optical surface and good bending performance are essential to ensure that the X-ray beam is accurately focused. Two elliptically bent X-ray mirror systems from FMB Oxford were characterized in the optical metrology laboratory at Diamond Light Source. A comparison of D...
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We report on the current state of surface slope metrology on deformable mirrors for soft x-rays at the Advanced Light Source (ALS). While we are developing techniques for in situ at-wavelength tuning, we are refining methods of ex situ visible-light optical metrology to achieve sub-100-nrad accuracy. This paper reports on laboratory studies, measurements and tuning of a deformable test-KB mirro...
متن کاملNon-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach.
In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision an...
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An open-source database containing metrology data for X-ray mirrors is presented. It makes available metrology data (mirror heights and slopes profiles) that can be used with simulation tools for calculating the effects of optical surface errors in the performances of an optical instrument, such as a synchrotron beamline. A typical case is the degradation of the intensity profile at the focal p...
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ژورنال
عنوان ژورنال: Review of Scientific Instruments
سال: 2016
ISSN: 0034-6748,1089-7623
DOI: 10.1063/1.4949272